发明授权
- 专利标题: Sample tilting device in electron microscope
- 专利标题(中): 电子显微镜样品倾斜装置
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申请号: US223643申请日: 1988-07-25
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公开(公告)号: US4950909A公开(公告)日: 1990-08-21
- 发明人: Takashi Yokoto , Shigeto Isakozawa
- 申请人: Takashi Yokoto , Shigeto Isakozawa
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 主分类号: G01N23/00
- IPC分类号: G01N23/00 ; B23Q1/54 ; H01J37/20
摘要:
A sample tilting device for use in an electron microscope provided with a microscope column in which a sample is illuminated by an electron beam. The sample is held in the microscope column and is removably supported by the microscope column so as to be capable of conically moving around a predetermined position. The sample is displacable in a direction transverse to the longitudinal axis of the electron beam by way of a threadable coupling between a motor and the shaft, with the shaft being axially displacable. The motor is supported by the microscope column so as to be rotatable together with the sample around a line passing through a predetermined position and crossing the axis of the electron beam.
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