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    METHOD AND APPARATUS FOR OBSERVING INSIDE STRUCTURES, AND SPECIMEN HOLDER
    2.
    发明申请
    METHOD AND APPARATUS FOR OBSERVING INSIDE STRUCTURES, AND SPECIMEN HOLDER 有权
    用于观察内部结构的方法和装置，以及样本持有人

    公开(公告)号：US20070252091A1

    公开(公告)日：2007-11-01

    申请号：US11775894

    申请日：2007-07-11

    申请人： Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

    发明人： Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

    IPC分类号： G01N23/00

    CPC分类号： H01J37/20 ,  G01N23/2251 ,  G01N23/2252 ,  H01J37/26 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/2802

    摘要： An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.

    摘要翻译： 本发明的目的是提供一种用于观察内部结构和样本保持器的方法和装置，其中可以使用相同的样本在相同的视野中跟踪良好样本的老化劣化到不良样本，以确定 失败的机制。 本发明是用于观察内部结构的方法。 该方法包括用从粒子束源产生的粒子束照射样本，检测由样本透射的透射粒子，向样本的一部分施加电压，并观察施加电压的透射粒子的检测状态 部分。

    Electron microscope
    3.
    发明授权
    Electron microscope 失效
    电子显微镜

    公开(公告)号：US5552602A

    公开(公告)日：1996-09-03

    申请号：US398684

    申请日：1995-03-06

    申请人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Tadokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa

    发明人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Tadokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa

    IPC分类号： G01N23/04 ,  G01R31/305 ,  H01J37/26

    CPC分类号： G01R31/305 ,  G01N23/046 ,  G01N2223/419 ,  H01J2237/226

    摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen as well as conventional electron microscope observations is carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. For that purpose, the present invention provides a scanning transmission electron microscope having an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons (i.d. avalanche multiplication), an electron gun emitting an electron beam toward the photoconductive-film to detect the holes generated therein, and electron deflector electrodes deflecting the electron beam on the photoconductive-film. Avalanche multiplication in the photoconductive-film amplifies the signal of these photons at so high signal-to-noise ratio that the electron microscope in this invention can detect such weak electrons as emitted at high angle from the specimen at high sensitivity and resolution. Therefore this invention enables a scanning transmission electron microscope to obtain for example 3-dimensional image of point defects and impurity elements existing in joint interfaces and contacts in a ULSI device rapidly and accurately.

    摘要翻译： 通过电子显微镜以高速和准确的方式对薄膜样品中的原子排列和原子种类进行3维观察，以及常规的电子显微镜观察，测量从样品以高角度发射的电子。 为此目的，本发明提供了一种具有电子检测装置的扫描透射电子显微镜，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 与这些光子（i.d.雪崩乘法）一样多的电子 - 空穴对的1000倍，向光电导膜发射电子束以检测其中产生的空穴的电子枪以及偏转电子束在光电导膜上的电子偏转器电极。 光电导膜中的雪崩乘法以如此高的信噪比放大了这些光子的信号，使得本发明的电子显微镜能够以高灵敏度和分辨率从样品中以高角度检测出这样的弱电子。 因此，本发明能够使扫描透射电子显微镜能够快速，准确地获得例如存在于ULSI装置的接合界面和触点中的点缺陷和杂质元素的3维图像。

    Charged particle beam generating apparatus of multi-stage acceleration type
    4.
    发明授权
    Charged particle beam generating apparatus of multi-stage acceleration type 失效
    多级加速型带电粒子束发生装置

    公开(公告)号：US5059859A

    公开(公告)日：1991-10-22

    申请号：US507798

    申请日：1990-04-12

    申请人： Junji Endo ,  Takeshi Kawasaki ,  Masahiro Tomita ,  Shigeto Isakozawa ,  Toshimitu Miyada ,  Yutaka Kaneko

    发明人： Junji Endo ,  Takeshi Kawasaki ,  Masahiro Tomita ,  Shigeto Isakozawa ,  Toshimitu Miyada ,  Yutaka Kaneko

    IPC分类号： H01J3/02 ,  H01J37/073

    CPC分类号： H01J3/029 ,  H01J37/073

    摘要： A charged particle beam generating apparatus of multi-stage acceleration type includes a charged particle beam source and a multi-stage acceleration tube having a plurality of acceleration electrodes arranged in cascade over a plurality of stages within the tube. A plurality of outer shield electrodes are disposed in concentrical relation on the radially outer side of the multi-stage acceleration tube over the plural stages to be applied with the same potentials as those of the associated acceleration electrodes respectively. Finally, a plurality of dividing resistors are disposed outside of the multi-stage acceleration tube or between the outer shield electrodes and the multi-stage acceleration tube so as to apply predetermined potentials to the acceleration electrodes, respectively.

    摘要翻译： 多级加速型的带电粒子束产生装置包括带电粒子束源和多级加速管，该多级加速管具有多个级联地布置在管内的多个级上的加速电极。 多个外屏蔽电极在多级加速管的径向外侧分别配置成相同的电位分别与相关的加速电极相同。 最后，将多个分压电阻器设置在多级加速管的外侧或外屏蔽电极与多级加速管之间，以分别对加速电极施加预定电位。

    Focusing device for a television electron microscope
    5.
    发明授权
    Focusing device for a television electron microscope 失效
    用于电视电子显微镜的聚焦装置

    公开(公告)号：US4680469A

    公开(公告)日：1987-07-14

    申请号：US766272

    申请日：1985-08-16

    申请人： Setsuo Nomura ,  Shigeto Isakozawa

    发明人： Setsuo Nomura ,  Shigeto Isakozawa

    IPC分类号： H01J37/26

    CPC分类号： H01J37/26

    摘要： Focusing device for a transmission type electron microscope displaying an enlarged image on a television monitor, in which the incident angle of the electron beam on the sample is varied with a constant frequency and the focal length of the objective electron lens is so controlled that there is no change between the image observed before change of the incident angle of the electron beam and that observed thereafter, wherein timing for changing the incident angle is set during the blanking intervals of the vertical synchronizing signal of the television so that fluctuations of the image can be clearly detected.

    摘要翻译： 在电视监视器上显示放大图像的透射型电子显微镜的聚焦装置，其中电子束在样品上的入射角以恒定频率变化，并且目标电子透镜的焦距被控制为存在 在电子束的入射角变化之前观察到的图像和其后观察到的图像之间没有变化，其中在电视机的垂直同步信号的消隐间隔期间设置用于改变入射角的定时，使得图像的波动可以 明确检测。

    Element mapping unit, scanning transmission electron microscope, and element mapping method
    6.
    发明授权
    Element mapping unit, scanning transmission electron microscope, and element mapping method 有权
    元素映射单元，扫描透射电子显微镜和元素映射方法

    公开(公告)号：US07928376B2

    公开(公告)日：2011-04-19

    申请号：US11232964

    申请日：2005-09-23

    申请人： Kazutoshi Kaji ,  Kazuhiro Ueda ,  Koji Kimoto ,  Takashi Aoyama ,  Shunroku Taya ,  Shigeto Isakozawa

    发明人： Kazutoshi Kaji ,  Kazuhiro Ueda ,  Koji Kimoto ,  Takashi Aoyama ,  Shunroku Taya ,  Shigeto Isakozawa

    IPC分类号： H01J47/00

    CPC分类号： H01J37/256

    摘要： There is provided an element mapping unit, scanning transmission electron microscope, and element mapping method that enable to acquire an element mapping image very easily. On the scanning transmission electron microscope, the electron beam transmitted through an object to be analyzed enters into the element mapping unit. The electron beam is analyzed of its energy into spectrum by an electron spectrometer and an electron energy loss spectrum is acquired. Because the acceleration voltage data for each element and window data for 2-window method, 3-window method or contrast tuning method are already stored in a database and accordingly the spectrum measurement is carried out immediately even when an element to be analyzed is changed to another, the operator can confirm a two-dimensional element distribution map immediately. Besides, because every electron beam that enters into an energy filter passes through the object point, aberration strain in the electron spectrometer can be minimized and higher energy stability can be achieved. As a result, drift of the electron energy loss spectrum acquired by analyzing the electron beam into spectrum can be minimized and element distribution with higher accuracy can be acquired.

    摘要翻译： 提供了能够非常容易地获取元素映射图像的元素映射单元，扫描透射电子显微镜和元件映射方法。 在扫描透射电子显微镜上，通过待分析物体传输的电子束进入元件映射单元。 电子束通过电子光谱仪将其能量分析成光谱，并获得电子能量损失光谱。 因为用于2窗口方法，3窗口方法或对比度调整方法的每个元素和窗口数据的加速电压数据已经存储在数据库中，因此即使当要分析的元素被改变为 另一方面，操作者可以立即确认二维元素分布图。 此外，由于进入能量过滤器的每个电子束通过物点，所以可以使电子光谱仪中的像差应变最小化并且可以实现更高的能量稳定性。 结果，可以将通过将电子束分析成光谱而获得的电子能量损耗光谱的漂移最小化，并且可以获得具有更高精度的元素分布。

    Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method
    9.
    发明授权
    Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method 有权
    终极分析仪，扫描透射电子显微镜和最终分析方法

    公开(公告)号：US06794648B2

    公开(公告)日：2004-09-21

    申请号：US10196577

    申请日：2002-07-17

    申请人： Kazutoshi Kaji ,  Takashi Aoyama ,  Shunroku Taya ,  Hiroyuki Tanaka ,  Shigeto Isakozawa

    发明人： Kazutoshi Kaji ,  Takashi Aoyama ,  Shunroku Taya ,  Hiroyuki Tanaka ,  Shigeto Isakozawa

    IPC分类号： H01J3726

    CPC分类号： G01N23/04 ,  G01N23/20 ,  H01J37/05 ,  H01J37/244 ,  H01J37/256 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/24495 ,  H01J2237/2522 ,  H01J2237/2802 ,  H01J2237/2804 ,  H01J2237/2809

    摘要： An object of the present invention is to provide an ultimate analyzer which can display an element distribution image of an object to be analyzed with high contrast to determine the positions of the element distribution with high accuracy, and a scanning transmission electron microscope and a method of analyzing elements using the ultimate analyzer. The present invention exists in an ultimate analyzer comprising a scattered electron beam detector for detecting an electron beam scattered by an object to be analyzed; an electron spectrometer for energy dispersing an electron beam transmitted through the object to be analyzed; an electron beam detector for detecting said dispersed electron beam; and a control unit for analyzing elements of the object to be analyzed based on an output signal of the electron beam detected by the electron beam detector and an output signal of the electron beam detected by the scattered electron beam detector. Further, the present invention exists in a scanning transmission electron microscope comprising the above ultimate analyzer; an electron beam source; an electron beam scanning coil; a scattered electron beam detector; objective lenses; a focusing lens; a magnifying magnetic field lens; and a focus adjusting electromagnetic lens. Furthermore, the ultimate analyzer or the scanning transmission electron microscope may comprises a control unit which makes it possible that both of an image of element distribution and an STEM image detected and formed by the scatted electron beam detector are observed at a time in real time, and the image of element distribution is corrected by the STEM image detected and formed by the scattered electron beam detector.

    摘要翻译： 本发明的目的是提供一种能够以高对比度显示待分析物体的元素分布图像，以高精度地确定元件分布的位置的最终分析器，以及扫描透射电子显微镜和 使用最终分析仪分析元素。 本发明存在于包含用于检测由待分析物体散射的电子束的散射电子束检测器的终极分析仪中; 用于能量分散通过待分析物体的电子束的电子光谱仪; 用于检测所述分散的电子束的电子束检测器; 以及控制单元，用于基于由电子束检测器检测的电子束的输出信号和由散射电子束检测器检测的电子束的输出信号来分析待分析物体的元件。 此外，本发明存在于包含上述极限分析仪的扫描透射电子显微镜中; 电子束源; 电子束扫描线圈; 散射电子束检测器; 物镜; 聚焦镜头; 放大磁场透镜; 和聚焦调整电磁透镜。 此外，最终分析器或扫描透射电子显微镜可以包括控制单元，其使得可以实时地观察由散射电子束检测器检测和形成的元件分布的图像和STEM图像两者， 并且通过由散射电子束检测器检测和形成的STEM图像校正元件分布的图像。