发明授权
US4956208A Manufacture of a quartz glass vessel for the growth of single crystal semiconductor 失效
制造用于生长单晶半导体的石英玻璃容器

Manufacture of a quartz glass vessel for the growth of single crystal
semiconductor
摘要:
A quartz glass crucible adapted for use in a process for pulling a single crystal semiconductor material having an opaque outer substrate of a quartz glass with a relatively high bubble content and an inner transparent glass layer which is substantially free from bubbles. The crucible is produced while the substrate is supported by a rotating mould by forming an atmosphere of high temperature gas and supplying a metered quantity of powders of quartz to the high temperature gas atmosphere to have the quartz powders molten at least partly and directed toward an inner surface of the substrate to be adhered thereon.
公开/授权文献
信息查询
0/0