发明授权
- 专利标题： Ultrasonic microscope
- 专利标题（中）： 超声波显微镜
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申请号： US378767申请日： 1989-07-12
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公开(公告)号： US4977544A公开(公告)日： 1990-12-11
- 发明人: Koichi Karaki , Mitsugu Sakai , Yasuo Sasaki
- 申请人： Koichi Karaki , Mitsugu Sakai , Yasuo Sasaki
- 申请人地址： JPX Tokyo
- 专利权人： Olympus Optical Co., Ltd.
- 当前专利权人： Olympus Optical Co., Ltd.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX63-182679 19880721
- 主分类号： G01H3/12
- IPC分类号： G01H3/12 ; G01N29/06 ; G01N29/22 ; G01N29/28
摘要：
An ultrasonic microscope includes a sample rod for supporting a sample and an acoustic lens positioned to face the sample. The lens is moved in two directions in a plane perpendicular to each other to scan the sample. During the scanning operation, the lens is also moved in a vertical direction so that the distance between the sample and acoustic lens is changed, by a piezoelectric actuator for supporting the lens.
公开/授权文献
- US5484672A Method of making a rim-type phase-shift mask 公开/授权日：1996-01-16
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