发明授权
- 专利标题: Process for producing a carrier tape
- 专利标题(中): 生产载带的方法
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申请号: US437635申请日: 1989-11-17
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公开(公告)号: US4982495A公开(公告)日: 1991-01-08
- 发明人: Masamitsu Okamoto , Masami Wada , Hidenori Funikawa , Haruo Kato , Hideaki Shouji
- 申请人: Masamitsu Okamoto , Masami Wada , Hidenori Funikawa , Haruo Kato , Hideaki Shouji
- 申请人地址: JPX Osaka
- 专利权人: Chisso Corporation
- 当前专利权人: Chisso Corporation
- 当前专利权人地址: JPX Osaka
- 优先权: JPX63-317136 19881215
- 主分类号: H01L21/60
- IPC分类号: H01L21/60 ; H01L21/48 ; H05K3/00 ; H05K3/02
摘要:
A process for producing a cheap carrier tape of a two layer structure having a superior heat resistance, difficultly susceptible of effect of impurities and having a superior flexibility is provided, which process comprising the following steps: coating a polyimide varnish onto a continuous, electrically-conductive metal foil and baking it; punching the resulting tape of a two layer structure of the metal foil and the polyimide film to form sprocket holes; cutting and removing the polyimide film to form a device hole; coating a resist onto the metal foil surface; light-exposing the resulting resist by the medium of a mask for separating a circuit pattern and a circuit from the sprocket parts; developing the resulting resist and etching the metal foil by the medium of a mask of the resist; removing the resist; and plating the metal foil.
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