发明授权
- 专利标题: Fine positioning device and displacement controller therefor
- 专利标题(中): 精密定位装置及其位移控制器
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申请号: US244101申请日: 1988-09-14
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公开(公告)号: US4991309A公开(公告)日: 1991-02-12
- 发明人: Kiyoshi Nagasawa , Kozo Ono , Kojiro Ogata , Ken Murayama , Yoshihiro Hoshino
- 申请人: Kiyoshi Nagasawa , Kozo Ono , Kojiro Ogata , Ken Murayama , Yoshihiro Hoshino
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi Construction Machinery Co., Ltd.
- 当前专利权人: Hitachi Construction Machinery Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX61-210616 19860909; JPX61-210618 19860909; JPX61-210619 19860909; JPX61-262437 19861104; JPX61-283061 19861129; JPX61-283062 19861129; JPX61-283063 19861129; JPX62-76269 19870331; JPX62-76270 19870331
- 主分类号: B23Q1/36
- IPC分类号: B23Q1/36 ; B23Q15/24 ; G01B5/00 ; G01B7/00 ; G05B19/23 ; G05D3/12 ; H01L21/68 ; H01L41/09
摘要:
A fine positioning device is formed of a rigid support member; a first set of radial flexible-beam displacement mechanisms provided symmetrically to each other on the support member to produce angular displacements about a first axis; a second set of radial flexible-beam displacement mechanisms provided symmetrically to each other on the support member to produce angular displacements about a second axis which is perpendicular to the first axis; a third set of radial flexible-beam displacement mechanisms connected to either one of the sets of radial flexible-beam displacement mechanisms to produce angular diaplacements about a third axis which is perpendicular to both the first and second axes; and a fine motion table fixed on the radial flexible-beam displacement mechanisms which are other than those connected to the radial flexible-beam displacement mechanisms for producing angular displacements about the third axis.
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