发明授权
- 专利标题: Acoustic microscope surface inspection system and method
- 专利标题(中): 声学显微镜表面检测系统及方法
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申请号: US320950申请日: 1989-03-09
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公开(公告)号: US4995259A公开(公告)日: 1991-02-26
- 发明人: Butrus T. Khuri-Yakub , Philippe Parent , Paul A. Reinholdtsen
- 申请人: Butrus T. Khuri-Yakub , Philippe Parent , Paul A. Reinholdtsen
- 申请人地址: CA Stanford
- 专利权人: The Board of Trustees of the Leland Stanford Junior University
- 当前专利权人: The Board of Trustees of the Leland Stanford Junior University
- 当前专利权人地址: CA Stanford
- 主分类号: G01N29/44
- IPC分类号: G01N29/44 ; G01N29/06 ; G01S15/89
摘要:
An acoustic microscope surface inspection system and method in which pulses of high frequency electrical energy are applied to a transducer which forms and focuses acoustic energy onto a selected location on the surface of an object and receives energy from the location and generates electrical pulses. The phase of the high frequency electrical signal pulses are stepped with respected to the phase of a reference signal at said location. An output signal is generated which is indicative of the surface of said selected location. The object is scanned to provide output signals representative of the surface at a plurality of surface locations.
公开/授权文献
- US5654643A Dielectric sensor apparatus 公开/授权日:1997-08-05
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