发明授权
US5009251A Fluid flow control 失效
流体流量控制

Fluid flow control
摘要:
Disclosed is a variable fluid flow controller for regulating the rate of flow from a source of fluid under pressure, comprising a plurality of unique flow restriction passagways, a valve associated with each passageway, and a rotatable cam for selectively opening any one of the valves while maintaining the remaining valves closed. The flow restriction passageway preferably comprises a channel etched on the surface of a first silicon wafer and enclosed by a second wafer to form a fluid flow passageway, one of the first or second wafers having a plurality of apertures therethrough for intersecting the passageway at various distances along its length.
信息查询
0/0