- 专利标题： Image sensor and manufacturing method for the same
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申请号： US468069申请日： 1990-01-22
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公开(公告)号： US5017502A公开(公告)日： 1991-05-21
- 发明人: Mitsunori Sakama , Takeshi Fukada , Naoya Sakamoto , Nobumitsu Amachi , Shigenori Hayashi , Takashi Inushima
- 申请人： Mitsunori Sakama , Takeshi Fukada , Naoya Sakamoto , Nobumitsu Amachi , Shigenori Hayashi , Takashi Inushima
- 申请人地址： JPX Kanagawa
- 专利权人： Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人： Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址： JPX Kanagawa
- 优先权： JPX62-158334 19870625; JPX62-162925 19870630
- 主分类号： G06K7/10
- IPC分类号： G06K7/10 ; H01L27/146 ; H01L31/105 ; H04N5/228 ; H04N5/369
摘要：
Disclosed is a method for producing image sensors having a plurality of sensing elements including the formation of parallel separating grooves by laser irradiation, the filling of the grooves with an insulating film, and the subsequent provision of a groove in the insulating film in a direction diagonal to the parallel grooves for metallization.
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