发明授权
US5034374A Method of producing high temperature superconductor Josephson element
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制造高温超导体约瑟夫逊元件的方法
- 专利标题： Method of producing high temperature superconductor Josephson element
- 专利标题（中）： 制造高温超导体约瑟夫逊元件的方法
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申请号： US365154申请日： 1989-06-12
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公开(公告)号： US5034374A公开(公告)日： 1991-07-23
- 发明人: Naoki Awaji , Yoshio Kikuchi
- 申请人： Naoki Awaji , Yoshio Kikuchi
- 申请人地址： JPX Kawasaki
- 专利权人： Fujitsu Limited
- 当前专利权人： Fujitsu Limited
- 当前专利权人地址： JPX Kawasaki
- 优先权： JPX63-146517 19880613; JPX1-013109 19890124
- 主分类号： H01L39/24
- IPC分类号： H01L39/24
摘要：
A method of producing a high temperature superconductor Josephson element for an electronic device or a photodetector comprising the steps of: forming a lower ceramic superconductor film on a substrate; forming an upper ceramic superconductor of a different system ceramic from that of the lower ceramic superconductor film on a portion of the lower ceramic superconductor and on the substrate; and forming an insulating layer (tunnel barrier) between the lower and upper ceramic superconductor films by an interdiffusion therebetween.
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