发明授权
- 专利标题: Handling apparatus for transferring a semiconductor wafer or LCD
- 专利标题(中): 用于传送半导体晶片或LCD的处理装置
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申请号: US506537申请日: 1990-04-09
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公开(公告)号: US5049029A公开(公告)日: 1991-09-17
- 发明人: Tadashi Mitsui , Susumu Saito
- 申请人: Tadashi Mitsui , Susumu Saito
- 申请人地址: JPX Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX62-226896 19870910
- 主分类号: B25J9/04
- IPC分类号: B25J9/04 ; B25J9/10 ; H01L21/677 ; H01L21/683
摘要:
A handling apparatus includes a base member having a rotating shaft, of a multijoint arm having one end portion thereof connected to the rotating shaft, a holder mounted at the free end portion of the arm, for holding a wafer, a stepping motor for circling the holder together with the arm about the rotating shaft, and another stepping motor for pivoting the arm joints. The multijoint arm is constituted by a plurality of parallel crank mechanisms arranged on corresponding planes in parallel with the circulating plane. One of the links constituting the first-stage parallel crank mechanism is fixed on the base member. During nonuse of the apparatus, the respective parallel crank mechanism overlap each other on the base member. Pulleys are mounted on joints of the arm, and a wire is wrapped around the pulleys. When at least one of the pulleys is pivoted, the parallel crank mechanisms are displaced, thereby extending or retracting the arm.
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