发明授权
- 专利标题: Pressure sensor and method of manufacturing same
- 专利标题(中): 压力传感器及其制造方法
-
申请号: US570312申请日: 1990-08-21
-
公开(公告)号: US5050034A公开(公告)日: 1991-09-17
- 发明人: Frank Hegner , Manfred Frank , Thomas Klahn
- 申请人: Frank Hegner , Manfred Frank , Thomas Klahn
- 申请人地址: DEX
- 专利权人: Endress u. Hauser GmbH u. Co.
- 当前专利权人: Endress u. Hauser GmbH u. Co.
- 当前专利权人地址: DEX
- 优先权: EPX90810045.6 19900122
- 主分类号: G01L9/12
- IPC分类号: G01L9/12 ; G01L9/00 ; H01L29/84
摘要:
The substrate (12) and/or the diaphragm (11) of the pressure sensor (10) are made of ceramic, glass, or a single-crystal material. The side of the diaphragm (11) facing the substrate (12) is covered with a layer of silicon carbide, niobium, or tantalum which, in turn, is covered with a protective layer (21) and serves as one capacitor electrode (14). The side of the substrate (12) facing the diaphragm (11) is covered with at least one additional layer of any one of said materials which, in turn, is covered with an additional protective layer (22) and serves as the second capacitor electrode (15). Substrate (12) and diaphragm (11) are soldered together by a formed part of active solder (20) which also serves as a spacer.This pressure sensor can be manufactured in a single soldering step. The maximum load capacity of the diaphragm is determined not by the strength of the joint, but only by the strength of the diaphragm material. The pressure sensor can be used at higher temperatures than pressure sensors with glass-frit joints.
公开/授权文献
- US5581042A Method for torque wrench non-contact angle measurement 公开/授权日:1996-12-03
信息查询