发明授权
- 专利标题: Method for making patterned thin film
- 专利标题(中): 制作图案薄膜的方法
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申请号: US343904申请日: 1989-04-26
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公开(公告)号: US5059454A公开(公告)日: 1991-10-22
- 发明人: David W. Todd , Lindsey Brown , Roger W. Phillips , Elliot E. Overshiner
- 申请人: David W. Todd , Lindsey Brown , Roger W. Phillips , Elliot E. Overshiner
- 申请人地址: CA Santa Rosa
- 专利权人: Flex Products, Inc.
- 当前专利权人: Flex Products, Inc.
- 当前专利权人地址: CA Santa Rosa
- 主分类号: C23F1/00
- IPC分类号: C23F1/00 ; H01L21/027 ; H01L21/30 ; H05K3/04 ; H05K3/06
摘要:
Method for providing a patterned thin film on a flexible web-like substrate having at least one surface. A patterned release coating which carries the desired pattern is deposited on the surface and has openings therein through which the surface of the substrate is exposed. A thin film is deposited over the patterned release coat and onto the portions of the surface exposed through the openings. The patterned release coating is then removed mechanically along with the thin film portions carried thereby to provide a patterned thin film on the substrate. The mechanical removal may be accomplished by advancing the coated substrate through a solvent while brushing the substrate, subjecting the substrate to high velocity air, or contacting the substrate with the adhesive layer of a web.
公开/授权文献
- US5524589A Throttle control apparatus 公开/授权日:1996-06-11
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