An ultra-precise positioning system includes a movable part, a rolling guide, a fixed part in supporting contact with the rolling guide, and a driving device for driving the movable part. The driving device includes a non-contact motor which applies a force to the movable part without touching engagement with the movable part. The system also includes a position measuring device for measuring a position of the movable part, a position reference generator for generating a reference position of the movable part, and a positioning control device for controlling the position of the movable part by comparing the measured position to the reference position, the positioning control device having a first control mode in a first operational region in which a resistance force arising due to displacement of the movable part varies in magnitude as a function of the force applied to the movable part by the driving device, and a second control mode in a second operational region in which frictional resistance force of the rolling guide is in a saturated condition and normal rolling of the rolling guide takes place, so that a resistance force resisting the force applied to the movable part by the driving device is substantially constant.