发明授权
- 专利标题： Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof
- 专利标题（中）： 扫描隧道电流检测装置及隧道电流检测方法及扫描隧道显微镜及其使用的记录再现装置
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申请号： US413194申请日： 1989-09-27
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公开(公告)号： US5107112A公开(公告)日： 1992-04-21
- 发明人: Yoshihiro Yanagisawa , Kunihiro Sakai , Hisaaki Kawade
- 申请人： Yoshihiro Yanagisawa , Kunihiro Sakai , Hisaaki Kawade
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX63-244590 19880930
- 主分类号： H01J37/244
- IPC分类号： H01J37/244 ; G01B7/02 ; G01N37/00 ; G01Q10/04 ; G01Q30/06 ; G01Q60/10 ; G01Q80/00 ; G01Q90/00 ; G11B9/00 ; G11B9/14 ; H01J37/28 ; H01L21/66
摘要：
A scanning tunnel-current-detecting device comprising at least two probe electrodes supported by a supporting member, a means for placing a sample in proximity to the probe electrodes, a means for applying voltage between the probe electrodes and the sample, at least one of the probe electrodes being provided with a mechanism for measuring and compensating variation of the distance between the supporting member and the sample, is provided.
公开/授权文献
- US5604463A Coupling circuit 公开/授权日：1997-02-18