发明授权
- 专利标题: Field effect device with polycrystalline silicon channel
- 专利标题(中): 具多晶硅通道的场效应器件
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申请号: US531014申请日: 1990-05-31
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公开(公告)号: US5135888A公开(公告)日: 1992-08-04
- 发明人: Tsiu C. Chan , Yu-Pin Han , Elmer H. Guritz
- 申请人: Tsiu C. Chan , Yu-Pin Han , Elmer H. Guritz
- 申请人地址: TX Carrollton
- 专利权人: SGS-Thomson Microelectronics, Inc.
- 当前专利权人: SGS-Thomson Microelectronics, Inc.
- 当前专利权人地址: TX Carrollton
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238 ; H01L21/02 ; H01L21/8244 ; H01L27/06 ; H01L27/092 ; H01L27/11
摘要:
A CMOS SRAM cell has a polycrystalline silicon signal line between a common node, which is the data storage node, and the power supply. A field effect device is fabricated within this polycrystalline silicon signal line. The channel of the field effect device is separated from an active area in the substrate by a thin gate dielectric, and the active region within the substrate functions as the control gate for the field effect device. Such a device can be used to provide polycrystalline silicon P-channel transistors for use in CMOS SPRAM cells.
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