发明授权
US5136604A Apparatus and method for detecting the power level in single and
multi-stripe integrated lasers
失效
用于检测单条和多条集成激光器功率电平的装置和方法
- 专利标题: Apparatus and method for detecting the power level in single and multi-stripe integrated lasers
- 专利标题(中): 用于检测单条和多条集成激光器功率电平的装置和方法
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申请号: US500814申请日: 1990-03-28
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公开(公告)号: US5136604A公开(公告)日: 1992-08-04
- 发明人: Thomas L. Paoli , Neville Connell , Doanld R. Scifres , Robert L. Thornton
- 申请人: Thomas L. Paoli , Neville Connell , Doanld R. Scifres , Robert L. Thornton
- 申请人地址: NY Rochester
- 专利权人: Xerox Corporation
- 当前专利权人: Xerox Corporation
- 当前专利权人地址: NY Rochester
- 主分类号: H01S5/00
- IPC分类号: H01S5/00 ; H01L27/15 ; H01S5/026 ; H01S5/042 ; H01S5/06 ; H01S5/0683 ; H01S5/40
摘要:
The present invention is an apparatus and method for providing detection of a laser output on a semiconductor wafer. A laser cavity and a detection cavity are formed on a semiconductor wafer in parallel such that light emitted laterally from the laser cavity is detected by the detection cavity. The amount of light detected can then be transformed into data, which in turn can be used to control the output of the laser.
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