A vibration wave driven motor having a vibratory elastic member provided with an electro-mechanical energy conversion element, and a rail-type stator on which the elastic vibratory member is resiliently pressed by, for example, springs. When A.C. power is supplied to the electro-mechanical energy conversion element, a traveling vibration wave is generated in the elastic vibratory member so that a frictional force is produced to act between the stator and the elastic member so as to cause a relative movement between the elastic vibratory member and the stator. At least one of the sliding surface of the elastic vibratory member and the sliding surface of the stator has a smoothly curved configuration, so as to improve the durability of the motor.