发明授权
US5146085A Encoder with high resolving power and accuracy 失效
具有高分辨力和精度的编码器

Encoder with high resolving power and accuracy
摘要:
A light beam is incident on a first position on a scale at such an angle that diffracted lights substantially coincide with an incident optical path, and two diffracted lights are directed along a substantially common optical path and are incident on a second position symmetrical with the first position. An interference light formed by rediffracted lights reflected from the second position is detected to thereby detect the displaced state of the scale.
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