发明授权
- 专利标题: Encoder with high resolving power and accuracy
- 专利标题(中): 具有高分辨力和精度的编码器
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申请号: US522051申请日: 1990-05-11
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公开(公告)号: US5146085A公开(公告)日: 1992-09-08
- 发明人: Koh Ishizuka , Tetsuharu Nishimura
- 申请人: Koh Ishizuka , Tetsuharu Nishimura
- 申请人地址: JPX Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX1-120046 19890512; JPX1-120047 19890512
- 主分类号: G01D5/38
- IPC分类号: G01D5/38 ; G11B19/12
摘要:
A light beam is incident on a first position on a scale at such an angle that diffracted lights substantially coincide with an incident optical path, and two diffracted lights are directed along a substantially common optical path and are incident on a second position symmetrical with the first position. An interference light formed by rediffracted lights reflected from the second position is detected to thereby detect the displaced state of the scale.
公开/授权文献
- US5704264A Cutting die with elevated stripping land 公开/授权日:1998-01-06
信息查询
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