发明授权
- 专利标题： Substrate holding device
- 专利标题（中）： 基板保持装置
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申请号： US672636申请日： 1991-03-20
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公开(公告)号： US5160961A公开(公告)日： 1992-11-03
- 发明人: Mitsuji Marumo , Kazunori Iwamoto , Nobutoshi Mizusawa , Takao Kariya , Shunichi Uzawa
- 申请人： Mitsuji Marumo , Kazunori Iwamoto , Nobutoshi Mizusawa , Takao Kariya , Shunichi Uzawa
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX2-071886 19900323
- 主分类号： H01L21/673
- IPC分类号： H01L21/673 ; G03F7/20 ; H01L21/027 ; H01L21/677 ; H01L21/683 ; H01L21/687
摘要：
A device for holding a substrate includes a holding system for holding a substrate by attraction and a guard system for preventing dropping of the substrate held by the holding system, the guard system being out of contact with the substrate as the same is held by the holding system.