发明授权
- 专利标题: Vertical heat-treating apparatus
- 专利标题(中): 立式热处理装置
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申请号: US605377申请日: 1990-10-30
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公开(公告)号: US5163832A公开(公告)日: 1992-11-17
- 发明人: Katsumi Ishii , Shingo Watanabe , Mitsuo Kato
- 申请人: Katsumi Ishii , Shingo Watanabe , Mitsuo Kato
- 申请人地址: JPX Kanagawa
- 专利权人: Tokyo Electron Sagami Limited
- 当前专利权人: Tokyo Electron Sagami Limited
- 当前专利权人地址: JPX Kanagawa
- 主分类号: F27D3/00
- IPC分类号: F27D3/00
摘要:
A vertical heat-treating apparatus which allows effective use of an installation space and improved productivity is disclosed. In this system, a plurality of housings, each accommodated with a vertical reactor, are aligned with each other. A gas feed unit and the like are arranged in front of each housing with a space disposed therebetween for conducting maintenance work. A rail is installed along the rear side of the housings. A boat liner is located on the rail for carrying a boat to the housings. An interface mechanism including a horizontal-vertical conversion handling unit for supplying the boat in a vertical state to the boat liner is disposed near the rail.
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