发明授权
- 专利标题: Method of and apparatus for measuring oscillation of the outside diameter of a melt surface
- 专利标题(中): 用于测量熔融表面外径振荡的方法和装置
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申请号: US693171申请日: 1991-04-29
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公开(公告)号: US5170061A公开(公告)日: 1992-12-08
- 发明人: Masahiko Baba
- 申请人: Masahiko Baba
- 申请人地址: JPX Tokyo
- 专利权人: Shin-Etsu Handotai Company, Limited
- 当前专利权人: Shin-Etsu Handotai Company, Limited
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX2-113289 19900429
- 主分类号: G01H9/00
- IPC分类号: G01H9/00 ; C30B15/20 ; C30B15/26 ; G06T1/00 ; G06T7/60 ; H01L21/208
摘要:
A method and an apparatus for measuring oscillation of a melt surface in growing a single crystal by Czochralski process, particularly in growing and pulling a crystal neck portion having a small diameter of 2 to 5 mm. The image of a region where the single crystal is being grown by the Czochralski process is taken by a camera 38 and the outside diameter D.sub.o of a bright ring image 70 of a brightness not lower than a predetermined reference value E is detected in accordance with video signals produced by the camera (Steps 80-83). The amount of oscillation of the outside diameter D.sub.o is measured as the amount S.sub.v of oscillation of the melt surface near the region where the single crystal is grown. The reference value E is determined by multiplying the maximum value of the video signals in one field with a predetermined constant K. The constant K is a value which, when the velocity of pulling of the single crystal is fixed to zero, substantially maximizes the amount of S.sub.v of oscillation of the outside diameter D.sub.o.
公开/授权文献
- US5852018A Pharmaceutical piperazine compounds 公开/授权日:1998-12-22