发明授权
- 专利标题: Method of enhancing the performance of a magnetron sputtering target
- 专利标题(中): 提高磁控溅射靶的性能的方法
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申请号: US814320申请日: 1991-12-23
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公开(公告)号: US5174875A公开(公告)日: 1992-12-29
- 发明人: Steven D. Hurwitt , Arnold J. Aronson , Charles Van Nutt
- 申请人: Steven D. Hurwitt , Arnold J. Aronson , Charles Van Nutt
- 申请人地址: NY Orangeburg
- 专利权人: Materials Research Corporation
- 当前专利权人: Materials Research Corporation
- 当前专利权人地址: NY Orangeburg
- 主分类号: C23C14/34
- IPC分类号: C23C14/34 ; C23C14/35 ; H01J37/34
摘要:
A plasma confining magnetic field is generated over the sputtering region of a sputtering target with a critical field line which determines the shape of the plasma. The critical field line is progressively flattened over the course of the life of the target as the target erodes. Preferably, the magnet is configured with poles spaced around the portion of the target below the sputtering region to provide a magnetic field that flattens as its strength decreases. A regulated power supply maintains a regulated power level that is increased as the target erodes to maintain a constant deposition rate. The voltage delivered by the power supply is maintained at or above a constant level by progressively decreasing the current to an electromagnet to progressively reduce the field strength and flatten the field. As a result of the invention, the erosion groove of the target is broadened and the number of wafers coated by the target during its life is increased.
公开/授权文献
- US5794686A Steam condenser 公开/授权日:1998-08-18
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