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US5185059A Process for producing electrode plate structure for liquid crystal color display device 失效
用于生产用于液晶彩色显示装置的电极板结构的方法

Process for producing electrode plate structure for liquid crystal color
display device
摘要:
An electrode plate structure for a liquid crystal color display is produced by forming a color filter layer of a photosensitive polyamide resin containing a colorant dispersed therein; disposing a protective layer of a photosensitive polyamide resin on the color filter layer; forming an ITO (indium-tin-oxide) film on the protective layer, preferably at an elevated temperature of at most 270.degree. C.; post-annealing the ITO film at a temperature of 200.degree.-300.degree. C. for improving the crystallinity of the ITO film suitable for etching; and selectively etching the ITO film patternwise with an etchant of hydroiodic acid or a hydroiodic acid-ferric chloride aqueous solution mixture to leave an ITO electrode pattern.
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