发明授权
- 专利标题： Vacuum chuck
- 专利标题（中）： 真空罐
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申请号： US723336申请日： 1991-06-28
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公开(公告)号： US5191218A公开(公告)日： 1993-03-02
- 发明人: Tetsuzo Mori , Mitsuji Marumo , Kazunori Iwamoto , Yuji Chiba , Kazuyuki Kasumi
- 申请人： Tetsuzo Mori , Mitsuji Marumo , Kazunori Iwamoto , Yuji Chiba , Kazuyuki Kasumi
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX2-169938 19900629; JPX2-182656 19900712
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; H01L21/683
摘要：
A vacuum-attraction holding device includes a holding base having an attracting surface, for holding a substrate thereon; a suction passageway formed in the base, for supplying a vacuum to the holding base to attract the substrate to the attracting surface; and a pressure sensor provided in the base and being communicated with the suction passageway.
公开/授权文献
- US5790914A Photographic processor and method of operation 公开/授权日：1998-08-04
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