发明授权
- 专利标题: Method and probe for non-destructive measurement of the thickness of thin layers and coatings
- 专利标题(中): 用于非破坏性测量薄层和涂层厚度的方法和探针
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申请号: US720885申请日: 1991-06-25
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公开(公告)号: US5191286A公开(公告)日: 1993-03-02
- 发明人: Helmut Fischer
- 申请人: Helmut Fischer
- 专利权人: Helmut Fischer
- 当前专利权人: Helmut Fischer
- 主分类号: G01B7/06
- IPC分类号: G01B7/06 ; G01R33/12
摘要:
Non-destructive methods of measurement for determining the thickness of thin layers, using the magneto-inductive method or the eddy-current method yield measured values which depend not only on the actual layer thickness present, but also on the shape of the measured object. It is the object of the invention to specify in a simple way, and without it being necessary for an operator to change his way of thinking, a device and a method in accordance with which the layer thickness indicated is virtually independent of the shape of the measured object. With regard to the device, this is achieved according to the invention when the probe has at least two different coil devices and, with regard to the method, when a corrected layer thickness is calculated from the different measured values of the two coil devices.
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