An N-tert-butyldialkylsilylmaleimide represented by the following general formula: ##STR1## wherein R's represent C.sub.1 to C.sub.5 alkyl groups which may be the same or different and a method of producing the compound. Said N-tert-butyldialkylsilylmaleimide is useful as a silylating agent, which does not produce hydrogen chloride or the like as a by-product and therefore does not require to use a neutralizing agent additionally. Further this compound is useful as a compound which provides a maleimido group.