发明授权
US5198285A Hard and lubricant thin film of iron base metallic material coated with
amorphous carbon-hydrogen-silicon
失效
用非晶碳氢化硅涂覆的铁基金属材料的硬质和润滑剂薄膜
- 专利标题: Hard and lubricant thin film of iron base metallic material coated with amorphous carbon-hydrogen-silicon
- 专利标题(中): 用非晶碳氢化硅涂覆的铁基金属材料的硬质和润滑剂薄膜
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申请号: US634506申请日: 1990-12-27
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公开(公告)号: US5198285A公开(公告)日: 1993-03-30
- 发明人: Tohru Arai , Kazuyuki Oguri
- 申请人: Tohru Arai , Kazuyuki Oguri
- 申请人地址: JPX Aichi
- 专利权人: Kabushiki Kaisha Toyota Chuo Kenkyusho
- 当前专利权人: Kabushiki Kaisha Toyota Chuo Kenkyusho
- 当前专利权人地址: JPX Aichi
- 优先权: JPX1-340858 19891228; JPX1-340860 19891228; JPX2-237767 19900907
- 主分类号: C23C16/26
- IPC分类号: C23C16/26
摘要:
A hard and lubricant thin film of amorphous carbon-hydrogen-silicon and a process of producing the same. The thin film comprises carbon and hydrogen as major components, the balance mainly containing a silicon-based material, and it contains diamond-like carbon. The content of hydrogen is from 30 to 50% by atomic and the content of carbon is 70% by atomic or more with respect to the total composition except hydrogen.An iron-based metallic material having the thin film of amorphous carbon-hydrogen-silicon formed thereon and a process for producing the same are also provided. The iron-based matallic material is very hard and has a small coefficient of friction.
公开/授权文献
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