发明授权
US5198285A Hard and lubricant thin film of iron base metallic material coated with amorphous carbon-hydrogen-silicon 失效
用非晶碳氢化硅涂覆的铁基金属材料的硬质和润滑剂薄膜

Hard and lubricant thin film of iron base metallic material coated with
amorphous carbon-hydrogen-silicon
摘要:
A hard and lubricant thin film of amorphous carbon-hydrogen-silicon and a process of producing the same. The thin film comprises carbon and hydrogen as major components, the balance mainly containing a silicon-based material, and it contains diamond-like carbon. The content of hydrogen is from 30 to 50% by atomic and the content of carbon is 70% by atomic or more with respect to the total composition except hydrogen.An iron-based metallic material having the thin film of amorphous carbon-hydrogen-silicon formed thereon and a process for producing the same are also provided. The iron-based matallic material is very hard and has a small coefficient of friction.
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