发明授权
- 专利标题： Method of making an optical element mold with a hard carbon film
- 专利标题（中）： 制造具有硬质碳膜的光学元件模具的方法
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申请号： US683537申请日： 1991-04-10
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公开(公告)号： US5202156A公开(公告)日： 1993-04-13
- 发明人: Kiyoshi Yamamoto , Keiji Hirabayashi , Noriko Kurihara , Yasushi Taniguchi , Keiko Ikoma
- 申请人： Kiyoshi Yamamoto , Keiji Hirabayashi , Noriko Kurihara , Yasushi Taniguchi , Keiko Ikoma
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX63-202739 19880816; JPX63-230148 19880916; JPX63-230149 19880916; JPX63-232234 19880919; JPX1-177144 19890711
- 主分类号： C03B11/08
- IPC分类号： C03B11/08 ; C03B40/02 ; C04B41/50 ; C04B41/85 ; C22C29/08 ; C23C14/06 ; C23C16/26
摘要：
This specification discloses a mold for use for press-molding an optical element, characterized in that at least the molding surface of a mold base material is coated with an a-C:H film containing 5-40 atom % of hydrogen therein and having a film density of 1.5 g/cm.sup.3 or more, and with hard carbon film containing 0-5 atom % of hydrogen therein and having a spin density of 1.times.10.sup.18 spin/cm.sup.3 or less and a film density of 1.5 g/cm.sup.3 or more.
公开/授权文献
- US6087727A Misfet semiconductor device having different vertical levels 公开/授权日：2000-07-11
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