Novel diamond-like carbon film and process for the production thereof
    3.
    发明授权
    Novel diamond-like carbon film and process for the production thereof 失效
    新颖的类金刚石碳膜及其生产方法

    公开(公告)号:US4935303A

    公开(公告)日:1990-06-19

    申请号:US257529

    申请日:1988-10-14

    IPC分类号: C23C16/26 C23C16/52 C30B25/10

    摘要: A general-purpose novel diamond-like carbon film (DLC film) and its manufacture, and the DLC film is characterized by the following items (i) to (iv); (i) the film structure contains mainly diamond crystalline phases, and has a hydrogen content of 20 atomic %, the presence of diamond crystalline phases is confirmed by analysis by the electron diffraction method, and the diffraction peak appears at 2.theta.=43.9 by analysis by the X-ray diffraction method; (ii) the density is 1.8 g/cm.sup.3 or over; (iii) the film surface is smooth and excellent in etching resistance; and (iv) the film is chemically stable and structurally stable, and these stabilities are not deteriorated under high temperature conditions.

    摘要翻译: 通用的新型类金刚石碳膜(DLC膜)及其制造方法,DLC薄膜的特征在于以下(i)〜(iv)项。 (i)膜结构主要包含金刚石结晶相,氢含量为20原子%,通过电子衍射法分析证实了金刚石晶相的存在,衍射峰通过分析出现在2θ= 43.9° 通过X射线衍射法; (ii)密度为1.8g / cm3以上; (iii)膜表面光滑,耐腐蚀性优异; 和(iv)该膜在化学上是稳定的和结构稳定的,并且这些稳定性在高温条件下不会劣化。

    Novel single-bond carbon film and process for the production thereof
    4.
    发明授权
    Novel single-bond carbon film and process for the production thereof 失效
    新型单键碳膜及其制备方法

    公开(公告)号:US4932331A

    公开(公告)日:1990-06-12

    申请号:US257085

    申请日:1988-10-13

    IPC分类号: C23C16/26

    CPC分类号: C23C16/26 Y10T428/30

    摘要: There is provided a novel single-bond carbonic film, matrix of which comprises carbon atoms and which is characterized by having a peak A at 1340.+-.20 cm.sup.-1 and a peak B at 1580.+-.10 cm.sup.-1 in Raman spectrum; a value of 9.7 or more for the ratio of I.sub.A /I.sub.B between the intensity of said peak A(I.sub.A) and the intensity of said peak B(I.sub.B): and a value in the range of from 30 cm.sup.-1 to 110 cm.sup.-1 for the half band width of said peak A.

    摘要翻译: 提供了一种新颖的单键碳膜,其基质包含碳原子,其特征在于在拉曼为1340 +/- 20cm -1处具有峰A和1580 +/- 10cm -1处的峰B 光谱; 所述峰A(IA)的强度与所述峰B(IB)的强度之间的IA / IB的比例为9.7以上的值,在30cm -1至110cm -1的范围内的值为9.7以上, 1表示所述峰A的半带宽。

    Mold with hydrogenated amorphous carbon film for molding an optical
element
    10.
    发明授权
    Mold with hydrogenated amorphous carbon film for molding an optical element 失效
    具有用于模制光学元件的氢化非晶碳膜的模具

    公开(公告)号:US5026415A

    公开(公告)日:1991-06-25

    申请号:US394208

    申请日:1989-08-15

    IPC分类号: C03B11/08 C04B41/85

    摘要: This specification discloses a mold for use for press-molding an optical element, characterized in that at least the molding surface of a mold base material is coated with an a-C:H film containing 5-40 atom % of hydrogen therein and having a film density of 1.5 g/cm.sup.3 or more. Other mold coating films also disclosed are a hydrogenated amorphous carbon film with an intermediate carbide layer between the film and the molding surface, and a hard carbon film containing 0-5 atom % of hydrogen therein and having a spin density of 1.times.10.sup.18 spin/cm.sup.3 or less and a film densisy of 1.5 g/cm.sup.3 or more.

    摘要翻译: 本说明书公开了一种用于对光学元件进行加压成型的模具,其特征在于,至少模具基材的成型表面涂覆有含有5-40原子%的氢的aC:H膜,并具有膜密度 为1.5g / cm 3以上。 还公开了其他模具涂膜是在膜和成型表面之间具有中间碳化物层的氢化无定形碳膜,以及其中含有0-5原子%氢的硬质碳膜,其自旋密度为1×10 18 spin / cm 3或 更小,膜密度为1.5g / cm 3以上。