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US5208882A Hybrid thin film optical waveguide structure having a grating coupler and a tapered waveguide film 失效
具有光栅耦合器和锥形波导膜的混合薄膜光波导结构

Hybrid thin film optical waveguide structure having a grating coupler
and a tapered waveguide film
摘要:
A hybrid, thin-film, optical waveguide structure has a substrate with a grating coupler formed thereon. A thin-film waveguide film is formed on the substrate and has a tapered portion overlaying the grating.
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