Invention Grant
US5225678A Spectoscopic sampling accessory having dual measuring and viewing systems
失效
具有双重测量和观察系统的光谱采样配件
- Patent Title: Spectoscopic sampling accessory having dual measuring and viewing systems
- Patent Title (中): 具有双重测量和观察系统的光谱采样配件
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Application No.: US792195Application Date: 1991-11-13
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Publication No.: US5225678APublication Date: 1993-07-06
- Inventor: Robert G. Messerschmidt
- Applicant: Robert G. Messerschmidt
- Applicant Address: PA Philadelphia
- Assignee: Connecticut Instrument Corporation
- Current Assignee: Connecticut Instrument Corporation
- Current Assignee Address: PA Philadelphia
- Main IPC: G01J3/453
- IPC: G01J3/453 ; G01N21/25 ; G01N21/35 ; G01N21/55 ; G01N21/65 ; G02B21/04
Abstract:
A microscope accessory uses symmetrical pairs of identical parabolic mirrors as an imaging optic to map a specimen plane with a remote focus. A mask at the remote focus defines at least one measuring area for making spectroscopic measurements while a separate viewing system simultaneously provides a wide field of view of the sample at higher magnification. The sample aperture, defines as 2T sterradians of solid angle surrounding each side of the specimen plane, is multiplexed between and among different functions--such as spectroscopic measurements and visual observations. The high numerical aperture possible using identical symmetrical aberration canceling (ISAC) optics facilitates the aperture multiplexing which has particular advantage in making reflectance measurements without any need for a significant loss of throughput efficiency.
Public/Granted literature
- US4664062A Apparatus for manufacturing semiconductors Public/Granted day:1987-05-12
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