发明授权
US5225678A Spectoscopic sampling accessory having dual measuring and viewing systems
失效
具有双重测量和观察系统的光谱采样配件
- 专利标题: Spectoscopic sampling accessory having dual measuring and viewing systems
- 专利标题(中): 具有双重测量和观察系统的光谱采样配件
-
申请号: US792195申请日: 1991-11-13
-
公开(公告)号: US5225678A公开(公告)日: 1993-07-06
- 发明人: Robert G. Messerschmidt
- 申请人: Robert G. Messerschmidt
- 申请人地址: PA Philadelphia
- 专利权人: Connecticut Instrument Corporation
- 当前专利权人: Connecticut Instrument Corporation
- 当前专利权人地址: PA Philadelphia
- 主分类号: G01J3/453
- IPC分类号: G01J3/453 ; G01N21/25 ; G01N21/35 ; G01N21/55 ; G01N21/65 ; G02B21/04
摘要:
A microscope accessory uses symmetrical pairs of identical parabolic mirrors as an imaging optic to map a specimen plane with a remote focus. A mask at the remote focus defines at least one measuring area for making spectroscopic measurements while a separate viewing system simultaneously provides a wide field of view of the sample at higher magnification. The sample aperture, defines as 2T sterradians of solid angle surrounding each side of the specimen plane, is multiplexed between and among different functions--such as spectroscopic measurements and visual observations. The high numerical aperture possible using identical symmetrical aberration canceling (ISAC) optics facilitates the aperture multiplexing which has particular advantage in making reflectance measurements without any need for a significant loss of throughput efficiency.
公开/授权文献
- US4664062A Apparatus for manufacturing semiconductors 公开/授权日:1987-05-12
信息查询