发明授权
- 专利标题： Semiconductor wafer basket
- 专利标题（中）： SEMICONDUCTOR WAFER BASKET
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申请号： US937218申请日： 1992-08-28
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公开(公告)号： US5228568A公开(公告)日： 1993-07-20
- 发明人: Nobuyoshi Ogino , Toshitsugu Yajima
- 申请人： Nobuyoshi Ogino , Toshitsugu Yajima
- 申请人地址： JPX Tokyo
- 专利权人： Shin-Etsu Handotai Co., Ltd.
- 当前专利权人： Shin-Etsu Handotai Co., Ltd.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX3-245252 19910830; JPX3-245253 19910830
- 主分类号： H01L21/673
- IPC分类号： H01L21/673
摘要：
A wafer basket having a detachable wafer press means on the back face of the top lid, which resilient press strips are bent and capable of temporarily changing the bent angles in response to external shocks such that the free end of each press strip at which each strip presses on the wafer stays immobile with respect to the edge of the wafer.
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