发明授权
- 专利标题: Hepa filter unit having a metallic membrane
- 专利标题(中): 具有金属膜的Hepa过滤器单元
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申请号: US947924申请日: 1992-09-21
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公开(公告)号: US5238477A公开(公告)日: 1993-08-24
- 发明人: Howard M. Layton
- 申请人: Howard M. Layton
- 专利权人: Layton Howard M
- 当前专利权人: Layton Howard M
- 主分类号: B01D39/20
- IPC分类号: B01D39/20 ; B01D46/52
摘要:
A submicron particle filter unit of the Hepa type adapted to be interposed between a source of pressurized gas and a work-processing region to provide an environment therefor free of particles and other contaminants. The membrane of the unit is fabricated from a continuous, elongated, porous metal sheet accordion-folded to define a uniform series of pleats forming a media pack having an entry and an exit face, the pack being clamped with gaskets between the side plates of a frame or welded or otherwise joined thereto. Pressurized gas from the source applied to the entry face of the pack is filtered therethrough to yield at its exit face a laminar flow of gas which creates a clean environment for the work-producing region.
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