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公开(公告)号：US5158586A
公开(公告)日：1992-10-27
申请号：US817329
申请日：1992-01-06
申请人： Howard M. Layton
发明人： Howard M. Layton
CPC分类号： B01D46/521 , B01D39/2034 , B01D46/10
摘要： A submicron particle filter unit of the Hepa type adapted to be interposed between a source of pressurized gas and a work-processing region to provide an environment therefor free of particles and other contaminants. The membrane of the unit is fabricated from a continuous, elongated, porous metal sheet accordion-folded to define a uniform series of pleats forming a media pack having an entry and an exit face, the pack being clamped with gaskets between the side plates of a frame or welded or otherwise joined thereto. Pressurized gas from the source applied to the entry face of the pack is filtered therethrough to yield at its exit face a laminar flow of gas which creates a clean environment for the work-producing region.
摘要翻译： 适于插入加压气体源和加工区域之间的Hepa型亚微米粒子过滤器单元，以提供不含颗粒和其它污染物的环境。 该单元的膜由一种连续的，细长的，多孔的多孔金属薄片制成，折叠式折叠以确定形成具有入口和出口面的介质包的均匀系列的褶皱，该包装在垫片的侧板之间被夹紧 框架或焊接或以其他方式连接到其上。 来自施加到包装入口面的源的加压气体被过滤通过，从而在其出口处产生气流的层流，为工作区域产生清洁的环境。
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公开(公告)号：US5105557A
公开(公告)日：1992-04-21
申请号：US667635
申请日：1991-03-11
申请人： Jozsef T. Vadasz , Howard M. Layton
发明人： Jozsef T. Vadasz , Howard M. Layton
CPC分类号： H01L21/67034 , F26B5/02 , F26B7/00
摘要： A system for drying microelectronic, optical and other parts which are rendered wet in the course of their processing, the system functioning rapidly to dry these parts so that they are free of contaminants. The system includes a drying chamber having a work zone in which the wet parts are held in a removable carrier resting on a stand, the work zone being heated to promote evaporation. Flowing through the work zone and passing over the wet parts is a gaseous stream which entrains vapors emitted from the parts and discharges the vapors from the chamber. To accelerate the evaporative process, a vibration generator is operatively coupled to the stand or to a vibration coupling device to impart vibrations thereto which are transmitted to the wet parts in the carrier, causing liquid drops on the surfaces of the parts to fractionate into droplets or to otherwise disperse and spread the liquid over a larger area, thereby greatly increasing the aggregate exposed surface area of the liquid.
摘要翻译： 用于干燥在其加工过程中变湿的微电子，光学和其它部件的系统，该系统快速地干燥这些部件，使得它们不含污染物。 该系统包括具有工作区域的干燥室，其中湿部件保持在可移动的托架上，搁置在支架上，工作区域被加热以促进蒸发。 流过工作区域并通过湿部件是气流，其夹带从部件排出的蒸气并将蒸气从室排出。 为了加速蒸发过程，振动发生器可操作地联接到支架或振动耦合装置以向其传递振动，其传递到载体中的湿部，导致部件表面上的液滴分馏成液滴或 否则将液体分散并扩散在较大的区域上，从而大大增加了液体的聚集露出表面积。
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公开(公告)号：US5899001A
公开(公告)日：1999-05-04
申请号：US858490
申请日：1997-05-19
申请人： Howard M. Layton
发明人： Howard M. Layton
CPC分类号： H01L21/67034 , F26B21/003 , F26B21/02
摘要： A system adapted to dry microelectronic, optical or other critical parts which in the course of their processing are rendered wet and become contaminated unless fully dried. The system includes an upright drying chamber having an inlet at its lower end and an outlet at its upper end, the parts to be dried being supported in a work zone between the inlet and outlet. Coupled to the inlet of the drying chamber is an input chamber having a blower therein which blows heated gas into the drying chamber through a filter unit covering the inlet thereto The blower creates a negative pressure in the input chamber and a positive pressure in the drying chamber in which the filtered heated gas acts to evaporate moisture from the parts in the work zone. Surrounding the drying chamber and communicating with the input chamber is an annular duct which due to the negative pressure in the input chamber draws heated moist gas from the outlet of the drying chamber into the input chamber for recirculation in the drying chamber in a toroidal flow patterns Because the heated gas flowing through the annular duct envelopes the drying chamber, it acts to maintain this chamber at a uniform operating temperature to promote uniform drying of the parts.
摘要翻译： 一种适于干燥微电子，光学或其他关键部件的系统，其在处理过程中变湿并变得污染，除非完全干燥。 该系统包括立式干燥室，其下端具有入口，其上端具有出口，待干燥的部件被支撑在入口和出口之间的工作区域中。 耦合到干燥室的入口是具有鼓风机的输入室，其中通过覆盖入口的过滤器单元将加热的气体吹入干燥室。鼓风机在输入室中产生负压，并在干燥室中产生正压 其中过滤的加热气体用于蒸发来自工作区域中的部件的水分。 围绕干燥室并与输入室连通的是环形管道，其由于输入室中的负压将加热的湿气从干燥室的出口吸入输入室，以在环形流动模式中在干燥室中再循环 因为流过环形管道的加热气体包围干燥室，所以它用于将该室保持在均匀的工作温度以促进部件的均匀干燥。
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公开(公告)号：US5238477A
公开(公告)日：1993-08-24
申请号：US947924
申请日：1992-09-21
申请人： Howard M. Layton
发明人： Howard M. Layton
CPC分类号： B01D46/521 , B01D39/2034 , B01D46/10
摘要： A submicron particle filter unit of the Hepa type adapted to be interposed between a source of pressurized gas and a work-processing region to provide an environment therefor free of particles and other contaminants. The membrane of the unit is fabricated from a continuous, elongated, porous metal sheet accordion-folded to define a uniform series of pleats forming a media pack having an entry and an exit face, the pack being clamped with gaskets between the side plates of a frame or welded or otherwise joined thereto. Pressurized gas from the source applied to the entry face of the pack is filtered therethrough to yield at its exit face a laminar flow of gas which creates a clean environment for the work-producing region.
摘要翻译： 适于插入加压气体源和加工区域之间的Hepa型亚微米粒子过滤器单元，以提供不含颗粒和其它污染物的环境。 该单元的膜由一种连续的，细长的，多孔的多孔金属薄片制成，折叠式折叠以确定形成具有入口和出口面的介质包的均匀系列的褶皱，该包装在垫片的侧板之间被夹紧 框架或焊接或以其他方式连接到其上。 来自施加到包装入口面的源的加压气体被过滤通过，从而在其出口处产生气流的层流，为工作区域产生清洁的环境。
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