发明授权
- 专利标题: Apparatus for detecting extraneous substances on a glass plate
- 专利标题(中): 用于检测玻璃板上的特殊物质的装置
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申请号: US813837申请日: 1991-12-27
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公开(公告)号: US5245403A公开(公告)日: 1993-09-14
- 发明人: Noboru Kato , Izuo Horai , Toshihiro Kimura , Mitsuyoshi Koizumi
- 申请人: Noboru Kato , Izuo Horai , Toshihiro Kimura , Mitsuyoshi Koizumi
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi Electronics Engineering Co., Ltd.
- 当前专利权人: Hitachi Electronics Engineering Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX2-414979 19901227
- 主分类号: G01B11/30
- IPC分类号: G01B11/30 ; G01N21/88 ; G01N21/89 ; G01N21/896 ; G01N21/94 ; G01N21/95 ; G01N21/958
摘要:
An apparatus for detecting extraneous substances on a glass plate includes a first light projecting system arranged above a plane under examination on a glass plate, the surface of which is irradiated with an S-polarized laser beam at a first elevation angle, a second light projecting system arranged above the surface thereof which is irradiated with a P-polarized laser beam at a second elevation angle greater than the first elevation angle, and a light receiving system for receiving scattered light from the surface irradiated with the laser beams respectively emitted from the first and the second light projecting system at an elevation angle smaller than the first elevation angle. The light receiving system is arranged on a side opposite to the direction of irradiation with the normal line set up at the laser beam irradiation point therebetween and the output level of the P-polarized laser beam is set in specific relation to the S-polarized laser beam.
公开/授权文献
- US4168444A Imaging devices 公开/授权日:1979-09-18
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