发明授权
- 专利标题: Capping layer preventing deleterious effects of As--P exchange
- 专利标题(中): 封盖层防止As-P交换的有害影响
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申请号: US859120申请日: 1992-03-27
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公开(公告)号: US5246878A公开(公告)日: 1993-09-21
- 发明人: Rajaram Bhat , Maria J. S. P. Brasil , Robert E. Nahory , William E. Quinn , Maria C. Tamargo
- 申请人: Rajaram Bhat , Maria J. S. P. Brasil , Robert E. Nahory , William E. Quinn , Maria C. Tamargo
- 申请人地址: NJ Livingston
- 专利权人: Bell Communications Research, Inc.
- 当前专利权人: Bell Communications Research, Inc.
- 当前专利权人地址: NJ Livingston
- 主分类号: H01L21/20
- IPC分类号: H01L21/20 ; H01L29/205
摘要:
A III-V semiconductor heterojunction in which a capping layer (14) is formed between the two layers (10, 16) of the heterojunction to prevent any deleterious effects due to As--P exchange. When InAlAs is grown on InP, the capping layer is AlP. When GaAs is grown on GaInP, the capping layer is GaP.
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