LPE Apparatus with improved thermal geometry
    3.
    发明授权
    LPE Apparatus with improved thermal geometry 失效
    LPE装置具有改进的热几何形状

    公开(公告)号:US4470368A

    公开(公告)日:1984-09-11

    申请号:US356931

    申请日:1982-03-10

    IPC分类号: C30B19/06 H01L21/208

    CPC分类号: C30B19/063 Y10S117/90

    摘要: In LPE boat-slider apparatus the boat, which carries the melts, is made of lower thermal conductivity material than the slider, which carries the substrate. Illustratively, the boat comprises sapphire and the slider comprises graphite. A confined-melt geometry is also described in which another slider, used to skim off thin portions of the melt, is also made of the lower thermal conductivity material.

    摘要翻译: 在LPE船滑块装置中,承载熔体的船由比传送基板的滑块低的导热材料制成。 说明性地,船包括蓝宝石,滑块包括石墨。 还描述了限制熔融几何形状,其中用于撇去熔体的薄部分的另一个滑块也由较低的热导率材料制成。