发明授权
- 专利标题： Discharge exciting excimer laser device
- 专利标题（中）： 放电激发准分子激光器件
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申请号： US775937申请日： 1991-11-04
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公开(公告)号： US5251226A公开(公告)日： 1993-10-05
- 发明人: Shuntaro Watanabe , Yasuo Oeda , Ken Ohmata , Michito Uehara , Mitsugu Terada , Hideaki Shibata , Yuichiro Terashi
- 申请人： Shuntaro Watanabe , Yasuo Oeda , Ken Ohmata , Michito Uehara , Mitsugu Terada , Hideaki Shibata , Yuichiro Terashi
- 申请人地址： JPX Tokyo
- 专利权人： Mitsui Petrochemical Industries, Ltd.
- 当前专利权人： Mitsui Petrochemical Industries, Ltd.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX2-53188 19900305
- 主分类号： H01S3/038
- IPC分类号： H01S3/038 ; H01S3/097
摘要：
A discharge exciting excimer laser device comprises a pair of main discharge electrodes, a dielectric and an auxiliary electrode. The dielectric is in a cylindrical form and has a side opposed to one of the main discharge electrodes, which side is formed into a flat plate-like portion. The auxiliary electrode is embraced within the dielectric leaving a space and is opposed to one of the main discharge electrodes with the flat plate-like portion of the dielectric sandwiched therebetween. Such a construction increases laser output and improves insulating performance.