公开(公告)号：US5251226A

公开(公告)日：1993-10-05

申请号：US775937

申请日：1991-11-04

申请人： Shuntaro Watanabe ,  Yasuo Oeda ,  Ken Ohmata ,  Michito Uehara ,  Mitsugu Terada ,  Hideaki Shibata ,  Yuichiro Terashi

发明人： Shuntaro Watanabe ,  Yasuo Oeda ,  Ken Ohmata ,  Michito Uehara ,  Mitsugu Terada ,  Hideaki Shibata ,  Yuichiro Terashi

IPC分类号： H01S3/038 ,  H01S3/097

CPC分类号： H01S3/038

摘要： A discharge exciting excimer laser device comprises a pair of main discharge electrodes, a dielectric and an auxiliary electrode. The dielectric is in a cylindrical form and has a side opposed to one of the main discharge electrodes, which side is formed into a flat plate-like portion. The auxiliary electrode is embraced within the dielectric leaving a space and is opposed to one of the main discharge electrodes with the flat plate-like portion of the dielectric sandwiched therebetween. Such a construction increases laser output and improves insulating performance.

公开(公告)号：US5197078A

公开(公告)日：1993-03-23

申请号：US708498

申请日：1991-05-31

申请人： Mitsugu Terada ,  Ken Ohmata ,  Michito Uehara ,  Hideaki Shibata ,  Yasuo Oeda ,  Yuichiro Terashi

发明人： Mitsugu Terada ,  Ken Ohmata ,  Michito Uehara ,  Hideaki Shibata ,  Yasuo Oeda ,  Yuichiro Terashi

IPC分类号： H01S3/034 ,  H01S3/036

CPC分类号： H01S3/036 ,  H01S3/034 ,  H01S3/0346

摘要： A gas laser apparatus having transparent laser windows provided on a laser chamber body, in which operating gases is sealed if necessary, comprising circulation means connected to the laser chamber body through an intake port and a discharge port for circulating gases within the laser chamber body and filtration means disposed in said circulation means, further comprising cutoff means for preventing the laser windows from being stained and open and closeably cutting off between the laser chamber body and the laser windows, and having a construction wherein in replacing the laser window, the cutoff means is once placed in a cutoff state, and the laser window is separated from the laser chamber body to place the laser window.

公开(公告)号：US5319441A

公开(公告)日：1994-06-07

申请号：US114287

申请日：1993-09-01

申请人： Mitsugu Terada ,  Ken Ohmata ,  Michito Uehara ,  Hideaki Shibata ,  Yasuo Oeda ,  Yuichiro Terashi

发明人： Mitsugu Terada ,  Ken Ohmata ,  Michito Uehara ,  Hideaki Shibata ,  Yasuo Oeda ,  Yuichiro Terashi

IPC分类号： G01J3/26 ,  G01J9/02 ,  H01S3/00 ,  G01B9/02

CPC分类号： G01J9/0246 ,  G01J2003/265

摘要： A laser light, whose wavelength is to be measured, is introduced into an etalon, a concentric circular interference stripe derived from the etalon is irradiated onto a one-dimensional photodetector array and a diameter of the interference stripe is measured to measure the wavelength of the laser light. Alternatively, if a reference laser light of known wavelength is introduced into the etalon, as described above, a wavelength measurement of extremely high accuracy can be made without being affected by positional deviations of the optical system.

摘要翻译： 将要测量其波长的激光引入标准具中，将衍生自标准具的同心圆形干涉条纹照射到一维光电检测器阵列上，并测量干涉条纹的直径以测量波长 激光灯。 或者，如果将已知波长的参考激光引入标准具，如上所述，可以在不受光学系统的位置偏差的影响的情况下进行极高精度的波长测量。