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US5253266A MBE effusion source with asymmetrical heaters 失效
不对称加热器的MBE渗流源

MBE effusion source with asymmetrical heaters
摘要:
An effusion source, for the generation of molecular beams, adapted to be positioned at an angle to the horizontal, within a vacuum chamber, of an MBE system including heating structures around the source to create uniform temperatures across the source in planes substantially parallel to the horizontal to cause uniform temperatures in planes substantially parallel to the horizontal in materials placed within the source and intended for MBE applications. A number of heating embodiments are described.
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