发明授权
- 专利标题: MBE effusion source with asymmetrical heaters
- 专利标题(中): 不对称加热器的MBE渗流源
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申请号: US916381申请日: 1992-07-20
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公开(公告)号: US5253266A公开(公告)日: 1993-10-12
- 发明人: Walter S. Knodle, III , Paul E. Luscher , Barry K. Caffee
- 申请人: Walter S. Knodle, III , Paul E. Luscher , Barry K. Caffee
- 申请人地址: CA Santa Clara
- 专利权人: Intevac, Inc.
- 当前专利权人: Intevac, Inc.
- 当前专利权人地址: CA Santa Clara
- 主分类号: C23C14/26
- IPC分类号: C23C14/26 ; C23C14/24 ; C30B23/06 ; F27B14/06 ; F27B14/14 ; H01L21/203 ; B05C11/00 ; C23C16/00
摘要:
An effusion source, for the generation of molecular beams, adapted to be positioned at an angle to the horizontal, within a vacuum chamber, of an MBE system including heating structures around the source to create uniform temperatures across the source in planes substantially parallel to the horizontal to cause uniform temperatures in planes substantially parallel to the horizontal in materials placed within the source and intended for MBE applications. A number of heating embodiments are described.
公开/授权文献
- US5806206A Gas distributor for vertical gas/solid reactors 公开/授权日:1998-09-15
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