发明授权
- 专利标题: Single crystal pulling apparatus
- 专利标题(中): 单晶拉丝机
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申请号: US829900申请日: 1992-02-03
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公开(公告)号: US5254319A公开(公告)日: 1993-10-19
- 发明人: Michiaki Oda , Koji Mizuishi
- 申请人: Michiaki Oda , Koji Mizuishi
- 申请人地址: JPX
- 专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人地址: JPX
- 优先权: JPX3-37895 19910208
- 主分类号: C30B15/00
- IPC分类号: C30B15/00 ; C30B15/30 ; C30B29/06 ; H01L21/208 ; C30B15/10
摘要:
Aa single crystal pulling apparatus installed on a frame body further includes a second frame body which is founded independently from the main chamber to rigidly support the winder assembly, and a hermetical and flexible tube which is provided between the winder assembly and the pull chamber to prevent any stress and vibration from travelling from the winder assembly to the pull chamber and vice versa, while providing a communication passage between the winder assembly and the pull chamber.
公开/授权文献
- US4138822A Portal-type precision measuring apparatus 公开/授权日:1979-02-13
信息查询
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