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US5258169A Silicon diimide, a process for its preparation and silicon nitride obtained therefrom 失效
硅二酰亚胺,其制备方法和由其获得的氮化硅

Silicon diimide, a process for its preparation and silicon nitride
obtained therefrom
摘要:
Silicon diimide having a carbon content of at most 0.5% by weight and a chlorine content of at most 20 ppm is prepared by reacting ammonia with organyl amino silane at 50.degree.-300.degree. C. at elevated pressure and is useful as an intermediate for high grade silicon nitride.
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