发明授权
US5262643A Automatic tip approach method and apparatus for scanning probe microscope
失效
扫描探针显微镜的自动尖端接近方法和装置
- 专利标题： Automatic tip approach method and apparatus for scanning probe microscope
- 专利标题（中）： 扫描探针显微镜的自动尖端接近方法和装置
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申请号： US897646申请日： 1992-06-12
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公开(公告)号： US5262643A公开(公告)日： 1993-11-16
- 发明人: James M. Hammond , Martin A. Klos , Yves Martin , Kenneth G. Roessler , Robert M. Stowell
- 申请人： James M. Hammond , Martin A. Klos , Yves Martin , Kenneth G. Roessler , Robert M. Stowell
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corp.
- 当前专利权人： International Business Machines Corp.
- 当前专利权人地址： NY Armonk
- 主分类号： G01B21/30
- IPC分类号： G01B21/30 ; G01N37/00 ; G01Q10/02 ; G01Q10/04 ; G01Q30/18 ; G01Q70/18 ; G05D3/12 ; H01V37/28
摘要：
A non-contact, step-wise method for automatically positioning a sensing probe, having a vibrating cantilever and tip, above a target surface utilizing acoustic and Van der Waals interactions respectively during an approach method. The sensing probe is lowered to a substantially optimized tip to target surface distance. The system utilizes the interaction of forces between the vibrating cantilever and target surface to automatically position the sensing probe above the target surface.
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