Invention Grant
US5285252A Optical method and optical device for distance measurement and their
application to the relative positioning of parts
失效
用于距离测量的光学方法和光学装置及其应用于部件的相对定位
- Patent Title: Optical method and optical device for distance measurement and their application to the relative positioning of parts
- Patent Title (中): 用于距离测量的光学方法和光学装置及其应用于部件的相对定位
-
Application No.: US997608Application Date: 1992-12-28
-
Publication No.: US5285252APublication Date: 1994-02-08
- Inventor: Aime Vareille , Andre Schiltz , Jean C. Hauuy
- Applicant: Aime Vareille , Andre Schiltz , Jean C. Hauuy
- Applicant Address: FRX
- Assignee: France Telecom
- Current Assignee: France Telecom
- Current Assignee Address: FRX
- Priority: FRX9116260 19911227
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/00 ; G01C3/08
Abstract:
An optical method and optical device for distance measurement, comprising the steps of emitting an incident light beam (13) comprising at least two waves of differing wavelengths (.lambda.1 and .lambda.2); separating this beam into a reference beam (15) and a measurement beam (17) which are reflected on, respectively, a reference reflector (16) and a zone (18) of a part (19), of which it is desired to measure the position in the direction of the measurement beam and recombine into a resultant beam (20), in which said waves exhibit conditions of polarization, the components of which rotate when the optical path of the aforementioned measurement beam varies and which determine, in the direction of the measurement beam, adjacent ranges at the ends of each one of which the angular positions of two corresponding components of these conditions of polarization are identical; determining, in the resultant beam (20), the angular positions (.alpha.1 and .alpha.2) of two corresponding components of said conditions of polarization of said waves; and computing, as a function of said angular positions, the distance separating the aforementioned zone of said part from a reference position, preferably the image of the reference reflector.Their application to the positioning of parts, especially of a chip inserted in a substrate.
Public/Granted literature
- US5965210A Hot dip coating apparatus and method Public/Granted day:1999-10-12
Information query