发明授权
- 专利标题: Method for treating an oxide coating
- 专利标题(中): 氧化物涂层处理方法
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申请号: US924318申请日: 1992-08-03
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公开(公告)号: US5286531A公开(公告)日: 1994-02-15
- 发明人: Thomas Krug , Klemens Ruebsam , Andreas Meier , Gerhard Steiniger , Mitsuru Kano , Noboru Sasaki , Takashi Miyamoto , Mamoru Sekiguchi
- 申请人: Thomas Krug , Klemens Ruebsam , Andreas Meier , Gerhard Steiniger , Mitsuru Kano , Noboru Sasaki , Takashi Miyamoto , Mamoru Sekiguchi
- 申请人地址: DEX Hanau JPX Tokyo
- 专利权人: Leybold Aktiengesellschaft,Toppan Printing Company, Ltd.
- 当前专利权人: Leybold Aktiengesellschaft,Toppan Printing Company, Ltd.
- 当前专利权人地址: DEX Hanau JPX Tokyo
- 优先权: DEX4203631 19920208
- 主分类号: C08J7/04
- IPC分类号: C08J7/04 ; C08J7/06 ; C23C14/08 ; C23C14/10 ; C23C14/14 ; C23C14/56 ; C23C14/58 ; C23C16/50
摘要:
The invention relates to a method for the aftertreatment of an oxide coating, and specifically an SiO.sub.x coating on a synthetic film. In this aftertreatment the oxide coating is exposed to a plasma whose particles effect positive changes of the oxide coating.
公开/授权文献
- US5891781A Method for coding mask read-only memory 公开/授权日:1999-04-06