发明授权
- 专利标题： Antiferromagnetic film superior in corrosion resistance, magnetoresistance-effect element and magnetoresistance-effect head including such thin film
- 专利标题（中）： 耐腐蚀性优异的反铁磁膜，磁阻效应元件和包含这种薄膜的磁阻效应头
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申请号： US668069申请日： 1991-03-12
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公开(公告)号： US5287237A公开(公告)日： 1994-02-15
- 发明人: Masahiro Kitada , Noboru Shimizu , Hideo Tanabe , Ryoichi Nakatani , Isamu Yuito , Naoki Koyama
- 申请人： Masahiro Kitada , Noboru Shimizu , Hideo Tanabe , Ryoichi Nakatani , Isamu Yuito , Naoki Koyama
- 申请人地址： JPX Tokyo
- 专利权人： Hitachi, Ltd.
- 当前专利权人： Hitachi, Ltd.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX2-064180 19900316; JPX2-287000 19901026; JPX2-295326 19901102
- 主分类号： G01R33/09
- IPC分类号： G01R33/09 ; G11B5/31 ; G11B5/39 ; H01F10/32 ; H01L43/08 ; G11B5/30 ; B32B15/00 ; G11B5/147
摘要：
In order to prevent generation of Barkhausen noise of a magnetoresistance-effect element, a thin antiferromagnetic film formed of Fe-Mn-X alloy containing a third alloying element X (which serves to improve corrosion resistance of Fe-Mn alloy) by 0.1 to 20 atomic % is disposed in adjacent to a thin permalloy film. The element X is selected from the group consisting of Ir, Ru, Zr, Nb, Si, Ge, V, Co, Pt and Pd. It is particularly recommended to employ Ir of 4 to 15 atomic % or Ru of 5.5 to 15 atomic % as the element X. When one or more alloying element selected from Ru, Rh, Pt, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Ni, Cu, Al, Si and Ge is added to Fe and Mn which are essential components of the Fe-Mn-X alloy in addition to the element X, corrosion resistance of the alloy is improved more sufficiently.
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