发明授权
US5292683A Method of isolating semiconductor devices and arrays of memory
integrated circuitry
失效
隔离半导体器件和存储器集成电路阵列的方法
- 专利标题: Method of isolating semiconductor devices and arrays of memory integrated circuitry
- 专利标题(中): 隔离半导体器件和存储器集成电路阵列的方法
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申请号: US71752申请日: 1993-06-09
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公开(公告)号: US5292683A公开(公告)日: 1994-03-08
- 发明人: Charles H. Dennison , Trung T. Doan
- 申请人: Charles H. Dennison , Trung T. Doan
- 申请人地址: ID Boise
- 专利权人: Micron Semiconductor, Inc.
- 当前专利权人: Micron Semiconductor, Inc.
- 当前专利权人地址: ID Boise
- 主分类号: H01L21/76
- IPC分类号: H01L21/76 ; H01L21/108 ; H01L21/762 ; H01L21/8234 ; H01L21/8242 ; H01L27/108 ; H01L29/78 ; H01L21/304
摘要:
A semiconductor processing device isolation method includes: a) providing non-LOCOS insulating device isolation blocks by trench and refill technique on a substrate to define recessed moat volume therebetween; b) providing gate dielectric within the moat volume; c) providing a layer of electrically conductive material over the substrate and gate dielectric to a thickness sufficient to completely fill the moat volume between adjacent isolation blocks; d) chemical-mechanical polishing the layer of electrically conductive material to provide a planarized upper electrically conductive material surface; e) photopatterning and etching the layer of electrically conductive material to provide an electrically conductive runner which overlies a plurality of the isolation blocks and to selectively remove the electrically conductive material from within selected regions of moat volume to define field effect transistor gates within the moat volume; and f) providing conductivity enhancing impurity through the selected regions of moat volume into the substrate to define source/drain regions adjacent the field effect transistor gates. The invention also includes an array of memory integrated circuitry.
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