发明授权
- 专利标题： Method of manufacturing a diamond heat sink
- 专利标题（中）： 制造金刚石散热器的方法
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申请号： US964390申请日： 1992-10-29
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公开(公告)号： US5294381A公开(公告)日： 1994-03-15
- 发明人: Takahisa Iguchi , Tsutomu Nakamura , Tetsuo Nakai
- 申请人： Takahisa Iguchi , Tsutomu Nakamura , Tetsuo Nakai
- 申请人地址： JPX Osaka
- 专利权人： Sumitomo Electric Industries, Ltd.
- 当前专利权人： Sumitomo Electric Industries, Ltd.
- 当前专利权人地址： JPX Osaka
- 优先权： JPX3-272830 19911021
- 主分类号： H01L21/48
- IPC分类号： H01L21/48 ; H01L23/373 ; H01L21/302
摘要：
A polycrystalline diamond is prepared by chemical vapor deposition (step 101). A surface of the polycrystalline diamond is metallized (step 102). The metallized surface of the polycrystalline diamond is grooved with a YAG laser (step 103). A wedge or the like is driven into the grooves of the polycrystalline diamond to pressurize the same, whereby the polycrystalline diamond is divided along the grooves (step 104). Alternatively, a surface of a polycrystalline diamond prepared by chemical vapor deposition is grooved with a YAG laser (step 112), so that the surface of the polycrystalline diamond is metallized (step 113) after the grooving.
公开/授权文献
- US4242386A Multiple glazing units 公开/授权日：1980-12-30
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