发明授权
US5298111A Automatic wafer transfer apparatus and a method for transferring wafers and an etching drum 失效
自动晶片转印装置和用于转印晶片和蚀刻滚筒的方法

Automatic wafer transfer apparatus and a method for transferring wafers
and an etching drum
摘要:
An automatic wafer transfer apparatus for transferring at once a plurality of wafers from a wafer basket to an etching drum which can be opened and closed by means of a movable housing and a horizontal set bar, to contain wafers therein; the wafer transfer apparatus comprising an elevator for elevating and lowering wafers, adapted to reciprocate vertically such that its top surface can pass through the etching drum to carry in the wafers, and the movable housing and the set bar of the etching drum for opening and closing the etching drum.
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